The Development of the Adhesion Force Measurement Apparatus for Individual Particle Based on Electric Field Method

摘要

We have developed the apparatus to measure the adhesion force of individual small particle by utilizing electric field between the small electrodes. When the electrostatic force acting on an electroconductive particle is stronger than the adhesion force of the particle on the bottom electrode, the particle begins to jump toward the top electrode. The adhesion state before and after the jumping of a particle is observed with the CCD camera set horizontally to the electrodes. We have determined the measurement conditions that should be satisfied in order to measure the adhesion force distributions with sufficient accuracy.