Influence of the Oxygen Flow Rate on Gas Flow Sputtered Thermal Barrier Coatings

摘要

Porous thermal barrier coatings (TBC) reduce the thermal load of gas turbine components. State-of-the-art TBCs consist of partially yttria-stabilized zirconia (PSZ) and are deposited by means of thermal spray techniques or electron beam physical vapor deposition. In this paper, an alternative, innovative deposition technique (reactive gas flow sputtering - GFS) is investigated and the influence of process parameters on the microstructure and the suitability of GFS coatings as TBCs is discussed. PSZ coatings were deposited on polished FeCrAlY-alloy substrates, with varying substrate temperature and oxygen flow rate, and characterized by means of SEM, and XRD.