首页> 外文期刊>Journal of Micromechanics and Microengineering >Shear force measurement of actuated, gecko-inspired adhesion elements with hierarchical polydimethylsiloxane pattern
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Shear force measurement of actuated, gecko-inspired adhesion elements with hierarchical polydimethylsiloxane pattern

机译:具有等级聚二甲基硅氧烷图案的抗壁板,壁虎启动粘附元素的剪切力测量

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摘要

The transfer of systems from nature to technical schemes is still a challenge as the fabrication of such complex systems in a cost efficient way while keeping the intended technical functionality requires appropriate materials and fabrication techniques. Here the multi-scale hierarchy of the gecko foot was transferred into membrane-actuated gecko-inspired adhesion elements (AE) to study the adhesion to surfaces. Therefore, a three level hierarchical polydimethylsiloxane (PDMS) structure comprising a membrane for actuating and the micron-patterned AE were mould from a microtechnical fabricated master into PDMS by thermal and UV curing. The micron-patterned AE consist of dot or line micron patterns on top of cuboid posts with 15 mu m height that representing the second hierarchical level. For master fabrication lithographic masking, wet and dry etching as well as SU8 3D lithography was applied.
机译:从大自然到技术方案的系统转移到技术方案仍然是一种以成本有效的方式制造这种复杂系统的挑战,同时保持预期的技术功能需要适当的材料和制造技术。 这里,壁虎脚的多尺度层次被转移到膜驱动的壁虎启动的粘附元件(AE)中,以研究与表面的粘附性。 因此,通过热和UV固化,将包含用于致动的三级等级聚二甲基硅氧烷(PDMS)结构,并将微米饰品AE从显微技术制造的母料中成PDMS模具。 微米图案化AE由长方体柱顶部的点或线微米图案组成,具有15μm高度,表示第二层级。 对于主制造光刻掩模,施加湿法和干蚀刻以及SU8 3D光刻。

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