LC Filters for FDM Readout of the X-IFU TES Calorimeter Instrument on Athena

摘要

The current status of lithographic superconducting LC filters for use in the Athena-X-IFU instrument is described. We present the fabrication process and characterization results at room temperature, 4?K and 50?mK. We also present an optimization study of the quality topics, where finite element modeling is used together with experimental validation structures. For the a-Si:H-based capacitors and Nb-based coils, presently the component fabrication yield is about 99% and the effective series resistance at?50 mK is lower than 1.5?mΩ.