Wear testing of ultrathin films

摘要

Methods for wear testing of ultrathin films (＜300 nm) are discussed. The films are used in microelectromechanical systems, microdevices, and magnetic storage devices. The study results obtained by atomic force microscope and microtribometer are given when testing the ultrathin, self-lubricating silicon dioxide and silicon nitride films with organic additives, which were deposited by glow discharge under atmospheric pressure and at low temperature.