Study of Rectangular Diaphragm-Microelectromechanical Systems Optical Pressure Sensor

摘要

The work, mathematical modeling and simulation solution for Optical Microelectromechanical systems (MEMS) based sensor to sense pressure is presented. The mathematical modeling of the sensor is obtained and simulation analysis of the proposed MEMS optical pressure sensor is explained.Uniform load analysis using Galerkin’s approach is obtained for a rectangular diaphragm. The stress distribution, frequency of vibration, elasto optic effects are analyzed for a rectangular diaphragm. Numerical analysis on displacement and thickness is carried out for a range of pressure.