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首页> 外文期刊>Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology >In-situ synthesis of Ti-Al intermetallic compounds coating on Ti alloy by magnetron sputtering deposition followed by vacuum annealing
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In-situ synthesis of Ti-Al intermetallic compounds coating on Ti alloy by magnetron sputtering deposition followed by vacuum annealing

机译:用磁控溅射沉积原位合成Ti-Al金属间化合物涂层,然后通过真空退火

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摘要

In this study, a thin Ti-Al intermetallic compounds (IMCs) coating was in-situ synthesized on a titanium alloy substrate through magnetron sputtering of Al followed by vacuum annealing. The microstructure, composition distribution, nanoindentation and microhardness, scratch and wear behavior of the obtained Ti-Al IMCs coating were investigated. It was found that TiAl3 is formed at the surface, and very thin TiAl and Ti3Al layers exist between the TiAl3 layer and the substrate. The microhardness of the TiAl3 (11.17 GPa) is almost twice as that of the substrate (6.03 GPa), and no cracking occurs during the indentation process. Microstructure observation and composition analysis suggest that metallurgical bonding is formed between the Ti-Al IMCs coating and the substrate, leading to a high bonding strength and almost no peeling during the whole scratch test. The tribological test reveals that the Ti-Al IMCs coating exhibits a lower friction coefficient and a much lower wear rate than those of the substrate, and the major wear mechanism of the Ti-Al IMCs coating is abrasive wear. Based on the findings, the in-situ synthesis of Ti-Al IMCs coating via magnetron sputtering followed by vacuum annealing can be considered a promising method to effectively improve the wear resistance of the Ti alloy.
机译:在该研究中,通过Al的磁控溅射随后是真空退火的磁控溅射在钛合金基质上以原位合成薄的Ti-Al金属间化合物(IMC)涂层。研究了所得Ti-A1MCS涂层的微观结构,组成分布,纳米狭窄,耐刮擦行为。发现TiAl3形成在表面处,并且在TiAl3层和基板之间存在非常薄的Tial和Ti3Al层。 TiAl3(11.17GPa)的显微硬度几乎是底物(6.03GPa)的两倍,并且在压痕过程中不会发生裂化。微观结构观察和组成分析表明,在Ti-Al IMCS涂层和基板之间形成冶金键合,导致高粘合强度,并且在整个划痕试验期间几乎没有剥离。摩擦学检测显示,Ti-A1 IMCs涂层表现出较低的摩擦系数和比基材的磨损率更低,并且Ti-Al IMCS涂层的主要磨损机理是磨料磨损。基于该发现,通过磁控溅射的原位合成通过磁控溅射,然后真空退火可以被认为是有效改善Ti合金的耐磨性的有希望的方法。

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