Mathematical model of deposition process of composite coatings based on intermetallic Ti-Al system by vacuum arc

摘要

This work is devoted to mathematical modeling of the process of deposition of composite coatings based on intermetallics of the Ti-Al system from vacuum-arc plasma, considering diffusion processes between alternating layers in order to predict the phase composition of the coating. The physical and chemical processes occurring during layer-by-layer deposition of multilayers coatings based on intermetallics of Ti-Al system by vacuum arc plasma in thin films were investigated. The processes occurring in the deposition of coatings based on intermetallic Ti-Al system by vacuum arc plasma were mathematically described. Diffusion processes were simulated using the finite element method. Diffusion processes occurring between layers of Ti and Al were modeled using Fick equations. Software based on mathematical model that allows to calculate the optimal deposition modes of coatings based on intermetallic Ti-Al system was developed. Influence of the deposition conditions on the content of intermetallic compounds in the coating was determined by X-ray diffraction methods. Results of mathematical model of deposition multilayer coatings considering diffusion processes were compared with experimental data. It is established that in the layer-by-layer deposition of titanium and aluminum, there are two mechanisms for the formation of intermetallic phases: due to diffusion processes and chemical reactions of samples running on the surface. A correlation between the percentage content of intermetallic phases in the coating and the diffusion processes between titanium and aluminum was established.