Measurement of nanometer-thick lubricating films using ellipsometric microscopy

摘要

A method based on vertical-objective-based ellipsometric microscopy (VEM) is presented for measuring lubricant film thickness in manometer sliding gaps. It provides an image of nanometer-thick lubricating films in real time at high lateral and thickness resolutions without any special layers. The ellipsometric image is directly converted into the film image by using a piezo-stage displacement method combined with a rotating compensator ellipsometry method. The accuracy of thickness measurement is about 1 nm. The VEM-based method revealed that nanometric deformation of the sliding surfaces arises in nanometric gaps even if the load is low, which significantly affects the lubrication properties in small gaps. This method is useful for clarifying the lubrication phenomena in nanometric sliding gaps.