A method to study the electric field distribution on sample surfaces in atom probe analysis

摘要

We report the development of a nondestructive method to estimate the electric field (EF) distribution on a nano-sized sample surface in atom probe (AP) analysis. The simulated EF distribution on an ideal hemisphere indicates that the largest EF exists on the geometrical top of the ideal hemisphere and that EF decreases as the emitting area getting away from the sample apex. To estimate the EF distribution on a real sample surface, the sample apex is determined via comparing the field ion microscopy (FIM) signal intensity of {113} planes on the symmetrical sample surface. A series of contour maps showing the intensity of the evaporated ions (eg, H+) was obtained by applying various EFs on the sample surface. A plot of relative EFs with respect to the emitting angle can thus be extracted.