机译:带环形电池几何空气耦合电容微机械超声换能器的集成元件建模
Univ Waterloo Waterloo Inst Nanotechnol Dept Syst Design Engn Adv Micro Nanodevices Lab 200 Univ Ave West Waterloo ON N2L 3G1 Canada;
Univ Waterloo Waterloo Inst Nanotechnol Dept Syst Design Engn Adv Micro Nanodevices Lab 200 Univ Ave West Waterloo ON N2L 3G1 Canada;
Univ Waterloo Waterloo Inst Nanotechnol Dept Syst Design Engn Adv Micro Nanodevices Lab 200 Univ Ave West Waterloo ON N2L 3G1 Canada;
Univ Waterloo Waterloo Inst Nanotechnol Dept Syst Design Engn Adv Micro Nanodevices Lab 200 Univ Ave West Waterloo ON N2L 3G1 Canada;
Techno Sci Inc 259 Edgeley Blvd Concord ON L4K 3Y5 Canada;
Univ Waterloo Waterloo Inst Nanotechnol Dept Syst Design Engn Adv Micro Nanodevices Lab 200 Univ Ave West Waterloo ON N2L 3G1 Canada;
Annular cells; Capacitive micromachined ultrasonic; transducers (CMUTs); Lumped element model; Air-coupled ultrasound;
机译:带环形电池几何空气耦合电容微机械超声换能器的集成元件建模
机译:压电微机械超声换能器(PMUT)使用集体元件参数的建模与工艺设计优化
机译:电容式微加工超声换能器的周期有限元/边界元建模
机译:开发6 x 6元件的空气耦合多移动膜电容微机械微机械超声换能器阵列,M〜3-cmut,用于高分辨率检测应用
机译:用于宽压范围应用的通用电容式微机械超声换能器(CMUT)的永久接触模式操作
机译:塌陷电容微机械超声换能器分析模型综述塌陷电压及静态膜偏转
机译:使用SOI晶片的阳极粘接工艺进行空气耦合圆形电容微机械超声换能器的有限元模拟