首页> 外文期刊>Surface review and letters >CHARACTERIZATION OF TiCN COATING SYNTHESIZED BY THE PLASMA ENHANCED PHYSICAL VAPOUR DEPOSITION PROCESS ON A CEMENTED CARBIDE TOOL
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CHARACTERIZATION OF TiCN COATING SYNTHESIZED BY THE PLASMA ENHANCED PHYSICAL VAPOUR DEPOSITION PROCESS ON A CEMENTED CARBIDE TOOL

机译:静体碳化物工具上等离子体增强物理气相沉积工艺合成的TiCN涂层的表征

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摘要

In the present investigation, Titanium Carbonitride (TiCN) coating was deposited on a cemented carbide substrate, by means of Plasma Enhanced Physical Vapour Deposition (PEPVD) process. The microstructure of the deposited film was characterized using the Scanning Electron Microscope (SEM). Highly dense, less porous and uniformly distributed TiCN coating was observed on the coated surface. X-Ray diffraction analysis was carried out to access the phases present in the coated layer. The scratch resistance and hardness were measured using the scratch tester and Nanoindenter, respectively. The TiCN coating gives higher hardness and superior scratch resistance when compared to the substrate. The surface morphology of the coated film was characterized using the Atomic Force Microscope (AFM) and was found that the surface roughness was lesser for TiCN coating when compared to cemented carbide substrate. The intensified TiCN coating on the substrate will be useful in improving the surface behavior of cemented carbide cutting tool.
机译:在本发明的研究中,通过等离子体增强物理气相沉积(PEPVD)工艺沉积在硬质合金底物上沉积碳氮化钛(TiCN)涂层。使用扫描电子显微镜(SEM)表征沉积膜的微观结构。在涂覆表面上观察到高度致密,较少的多孔和均匀分布的TiCN涂层。进行X射线衍射分析以进入存在于涂层中存在的相。使用划痕测试仪和纳米丁烯分别测量耐刮擦性和硬度。与基材相比,TiCN涂层具有更高的硬度和优异的耐刮擦性。使用原子力显微镜(AFM)表征涂膜的表面形态,并发现与硬质合金衬底相比,在TiCN涂层的表面粗糙度较小。基材上的增强的TiCN涂层可用于改善硬质合金切削工具的表面行为。

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