Large‐Area Patterning of Metal Nanostructures by Dip‐Pen Nanodisplacement Lithography for Optical Applications

Chen Lina; Wei Xiaoling; Zhou Xuechang; Xie Zhuang; Li Kan; Ruan Qifeng; Chen Chaojian; Wang Jianfang; Mirkin Chad A.; Zheng Zijian

摘要

Abstract > Au nanostructures are remarkably important in a wide variety of fields for decades. The fabrication of Au nanostructures typically requires time‐consuming and expensive electron‐beam lithography (EBL) that operates in vacuum. To address this challenge, this paper reports the development of massive dip‐pen nanodisplacement lithography (DNL) as a desktop fabrication tool, which allows high‐throughput and rational design of arbitrary Au nanopatterns in ambient condition. Large‐area (1 cm 2 ) and uniform (10% variation) Au nanostructures as small as 70 nm are readily fabricated, with a throughput 100‐fold higher than that of conventional EBL. As a proof‐of‐concept of the applications in the opitcal field, we fabricate discrete Au nanorod arrays that show significant plasmonic resonance in the visible range, and interconnected Au nanomeshes that are used for transparent conductive electrode of solar cells. </abstract> </span> <span class="z_kbtn z_kbtnclass hoverxs" style="display: none;">展开▼</span> </div> <div class="translation abstracttxt"> <span class="zhankaihshouqi fivelineshidden" id="abstract"> <span>机译：</span><abstract xmlns =“http://www.wiley.com/namespaces/wiley”type =“main”xml：lang =“en”> <title type =“main”>抽象</ title> > au nanostructure几十年来，在各种各样的领域中非常重要。 Au纳米结构的制造通常需要在真空中操作的耗时和昂贵的电子束光刻（EBL）。为了解决这一挑战，本文报告了大规模DIP-PEN纳米剥离光刻（DNL）作为桌面制造工具的发展，这允许在环境条件下进行任意Au NanoPattern的高通量和合理设计。大面积（1cm 2 </ sup>）和均匀（＆ 10％变化）易于制造小于70nm的Au纳米结构，其通过高于传统EBL的通量100倍。作为Opitcal领域中应用的概念验证，我们制造了在可见范围内显示出显着的等离子体共振的离散AU纳米峰阵列，以及用于太阳能电池的透明导电电极的相互连接的Au NaNMeshes。 </ p> </ abstract> </span> <span class="z_kbtn z_kbtnclass hoverxs" style="display: none;">展开▼</span> </div> </div> <div class="record"> <h2 class="all_title" id="enpatent33" > 著录项</h2> <ul> <li> <span class="lefttit">来源</span> <div style="width: 86%;vertical-align: text-top;display: inline-block;"> <a href='/journal-foreign-28247/'>《Small 》</a> <b style="margin: 0 2px;">|</b><span>2017年第43期</span><b style="margin: 0 2px;">|</b> <span>共1页</span> </div> </li> <li> <div class="author"> <span class="lefttit">作者</span> <p id="fAuthorthree" class="threelineshidden zhankaihshouqi"> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Chen Lina&option=202" target="_blank" rel="nofollow">Chen Lina;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Wei Xiaoling&option=202" target="_blank" rel="nofollow">Wei Xiaoling;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Zhou Xuechang&option=202" target="_blank" rel="nofollow">Zhou Xuechang;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Xie Zhuang&option=202" target="_blank" rel="nofollow">Xie Zhuang;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Li Kan&option=202" target="_blank" rel="nofollow">Li Kan;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Ruan Qifeng&option=202" target="_blank" rel="nofollow">Ruan Qifeng;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Chen Chaojian&option=202" target="_blank" rel="nofollow">Chen Chaojian;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Wang Jianfang&option=202" target="_blank" rel="nofollow">Wang Jianfang;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Mirkin Chad A.&option=202" target="_blank" rel="nofollow">Mirkin Chad A.;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Zheng Zijian&option=202" target="_blank" rel="nofollow">Zheng Zijian;</a> </p> <span class="z_kbtnclass z_kbtnclassall hoverxs" id="zkzz" style="display: none;">展开▼</span> </div> </li> <li> <div style="display: flex;"> <span class="lefttit">作者单位</span> <div style="position: relative;margin-left: 3px;max-width: 639px;"> <div class="threelineshidden zhankaihshouqi" id="fOrgthree"> <p>Laboratory for Advanced Interfacial Materials and DevicesInstitute of Textiles and ClothingHong Kong SAR China;</p> <p>Laboratory for Advanced Interfacial Materials and DevicesInstitute of Textiles and ClothingHong Kong SAR China;</p> <p>Laboratory for Advanced Interfacial Materials and DevicesInstitute of Textiles and ClothingHong Kong SAR China;</p> <p>Laboratory for Advanced Interfacial Materials and DevicesInstitute of Textiles and ClothingHong Kong SAR China;</p> <p>Laboratory for Advanced Interfacial Materials and DevicesInstitute of Textiles and ClothingHong Kong SAR China;</p> <p>Department of PhysicsThe Chinese University of Hong KongShatin Hong Kong SAR China;</p> <p>Laboratory for Advanced Interfacial Materials and DevicesInstitute of Textiles and ClothingHong Kong SAR China;</p> <p>Department of PhysicsThe Chinese University of Hong KongShatin Hong Kong SAR China;</p> <p>Department of Chemistry and International Institute for NanotechnologyNorthwestern University2145 Sheridan Road Evanston IL 60208 USA;</p> <p>Laboratory for Advanced Interfacial Materials and DevicesInstitute of Textiles and ClothingHong Kong SAR China;</p> </div> <span class="z_kbtnclass z_kbtnclassall hoverxs" id="zhdw" style="display: none;">展开▼</span> </div> </div> </li> <li> <span class="lefttit">收录信息</span> <span style="width: 86%;vertical-align: text-top;display: inline-block;"></span> </li> <li> <span class="lefttit">原文格式</span> <span>PDF</span> </li> <li> <span class="lefttit">正文语种</span> <span>eng</span> </li> <li> <span class="lefttit">中图分类</span> <span> <a href="https://www.zhangqiaokeyan.com/clc/6960.html" title="特种结构材料">特种结构材料 ;</a></span> </li> <li class="antistop"> <span class="lefttit">关键词</span> <p style="width: 86%;vertical-align: text-top;"> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=nanofabrication&option=203" rel="nofollow">nanofabrication;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=polymer brush&option=203" rel="nofollow">polymer brush;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=scanning probe lithography&option=203" rel="nofollow">scanning probe lithography;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=solar cells&option=203" rel="nofollow">solar cells;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=transparent conductive electrodes&option=203" rel="nofollow">transparent conductive electrodes;</a> </p> <div class="translation"> 机译：纳米制剂;聚合物刷;扫描探针光刻;太阳能电池;透明导电电极; </div> </li> </ul> </div> </div> <div class="literature cardcommon"> <div class="similarity "> <h3 class="all_title" id="enpatent66">相似文献</h3> <div 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hot dip coating of metal strip i.e. steel strip (claimed) for industrial applications, has molten bath vessel including opening with trunk part for introducing metal strip into molten metal bath</a> <b>[P]</b> . <span> 外国专利：  DE102013104267B3 </span> <span> . 2014-02-27</span> </div> <p class="zwjiyix translation" style="max-width: initial;height: auto;word-break: break-all;white-space: initial;text-overflow: initial;overflow: initial;"> <span>机译：用于连续热浸镀覆金属带材的设备，即用于工业应用的钢带（要求保护），该设备具有熔池容器，该容器包括带有主干部分的开口，用于将金属带引入熔池中 </span> </p> </li> <li> <div> <b>4. </b><a class="enjiyixqcontent" href="/patent-detail/06130445357157.html">BASE MATERIAL ON WHICH PATTERN IS FORMED AND ITS METAL MOLD, OPTICAL PICKUP DEVICE, ELECTRON BEAM LITHOGRAPHY, BASE MATERIAL ON WHICH PATTERN IS FORMED BY THE SAME METHOD, AND ELECTRON BEAM LITHOGRAPHIC DEVICE</a> <b>[P]</b> . <span> 外国专利：  JP2003075602A </span> <span> . 2003-03-12</span> </div> <p class="zwjiyix translation" style="max-width: initial;height: 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