Validity and Accuracy of Resonance Shift Prediction Formulas for Microcantilevers: A Review and Comparative Study

摘要

This article provides a review of methods of predicting mass-induced resonance shifts in microcantilevers. It combines a review of factors that influence resonance frequency shifts, such as material properties, size effects, and support compliance with a comparative study of accuracy of predicting resonance shifts due to mass adsorption. The applicability and accuracy of widely used formulas to correlate mass addition with resonance shift are assessed through comprehensive comparison with experimental measurements and numerical methods. The methods include both distributed parameter and lumped parameter formulations. The applications include distributed added masses, tip masses, and added mass at arbitrary locations along a cantilever span.