Modeling and closed loop control of a polymer composite-based hard-magnetic micromirror for optical switching applications

摘要

Abstract In this paper, a mathematical model is first established for an electromagnetic actuated polymer composite-based MEMS hard-magnetic micromirror. The model consists of the analyses of the mechanical parts for torsional scanner, the electro-coils parts and the magnetic actuator parts of the hard-magnetic films. To illustrate the effectiveness of such a model, the static and dynamic performance is further analyzed using both finite element method and it is experimentally validated. The experimental results show that our models are valid. Finally, considering the high performance requirements of optical switching applications proportional-integral-derivative (PID) controller with incomplete differentials and the integral sliding mode surface with PID form controller which is based on the established mathematical model is designed to improve its transient response. And the experimental results of set-point regulation have demonstrated that the 95% setting time is shortened from 45 to 10?ms while improving the overshoot.