The Development of Transmittance Electron Microscopy and Atom Probe Tomography Simultaneous Analysis in the Humidity Sensor Membrane

摘要

The core of mobile product is its multifunction sensor, a sensor for developing a low-cost but highly integrated as to implement a high performance as a requirement. This multi-functional composite sensor development process is made of a number of steps, and requires analysis of the issue or other defects in the process of the sensor. In the humidity sensor, we use the TEM and APT equipment to detect the distribution of elements between electrodes and the silicon oxide of the interface region in the sensor's membrane as an atomic unit. However, it is difficult to use APT analysis with the same TEM analysis sample because the TEM electron beam destroys the APT tip sample. In this study, we study conditions that can be analyzed in the same sample according to sample preparation conditions. The APT analysis region has a maximum sample diameter of 100 nm and a length of 300 nm. The sample is prepared by fixing a sample to be analyzed on a tungsten tip with a probe shape using FIB. The prepared specimens were coated with 3 nm of Ni metal to prevent sample destruction during TEM analysis. As a result, sample destruction was prevented. Finally, we develop TEM and APT simultaneous analysis techniques to overcome this problem and discuss the results.