Fabrication of Large-Area Metal Nanopatterns by Nanoimprint Lithography

摘要

In this work, fabrication of large area metal nanopatterns based on ultraviolet (UV) roll nanoimprint lithography (UV-NIL) process was demonstrated. The step and repeat UV-NIL process was carried out to fabricate large area polyurethane acrylate (PUA) nanopatterns with pattern area of 120 mm by 720 mm in width and length. To make metal nanopatterns from the PUA patterns, nickel (Ni) electroplating process was conducted. As a result, large area (600 mm by 600 mm in width and length) metal nanopatterns with pillar diameter of 300 nm were successively fabricated by the electroplating process from the PUA nanopatterns, resulting in a metal nanostamp with nanopillar pattern. We also demonstrated a nanopatterned roller mold with a metal nanostamp on the surface. A nanopatterned roller mold with a metal nanopattern developed in this study could be further applied as a roller mold for mass production of functional nanopatterned films in optical and abrasive film application.