机译:硅中深度激光光刻制造的片式微结构和光子器件
Bilkent Univ Dept Phys TR-06800 Ankara Turkey;
Bilkent Univ Dept Elect &
Elect Engn TR-06800 Ankara Turkey;
Bilkent Univ Dept Phys TR-06800 Ankara Turkey;
Bilkent Univ Dept Phys TR-06800 Ankara Turkey;
Middle East Tech Univ Ctr Solar Energy Res &
Applicat TR-06800 Ankara Turkey;
MIT Dept Elect Engn &
Comp Sci Cambridge MA 02139 USA;
Bilkent Univ Dept Elect &
Elect Engn TR-06800 Ankara Turkey;
Helmholtz Zentrum Dresden Rossendorf Inst Ion Beam Phys &
Mat Res Bautzner Landstr 400 D-01328 Dresden Germany;
Middle East Tech Univ Ctr Solar Energy Res &
Applicat TR-06800 Ankara Turkey;
Bilkent Univ Dept Phys TR-06800 Ankara Turkey;
Middle East Tech Univ Ctr Solar Energy Res &
Applicat TR-06800 Ankara Turkey;
Middle East Tech Univ Ctr Solar Energy Res &
Applicat TR-06800 Ankara Turkey;
Bilkent Univ Dept Elect &
Elect Engn TR-06800 Ankara Turkey;
Harvard Med Sch Boston MA 02115 USA;
Bilkent Univ Dept Phys TR-06800 Ankara Turkey;
Bilkent Univ Dept Phys TR-06800 Ankara Turkey;
机译:硅中深度激光光刻制造的片式微结构和光子器件
机译:使用深UV投影光刻和深反应离子蚀刻制造的激光解吸电离(LDI)硅纳米多型阵列芯片
机译:激光干涉光刻技术制备的大面积二维硅红外光子晶体
机译:利用深紫外光刻技术制造硅光子器件的光刻模拟
机译:通过飞秒激光写入,热极化和波导建模制造的非线性玻璃波导器件,用于玻璃中的银离子交换。
机译:硅内部深处的非线性激光光刻制造的芯片内微结构和光子器件
机译:片内微结构和非线性制造的光子器件 激光光刻深入硅内部