Miniaturized high-performance metallic 1T-Phase MoS2 micro-supercapacitors fabricated by temporally shaped femtosecond pulses

摘要

The recent development of wearable and portable microelectronic devices requires energy storage devices to be miniaturized; micro-supercapacitors (MSCs), as one of the most outstanding candidates, have great potential in future electronic devices. However, in the miniaturization of MSCs, the maintenance of electrochemical performance remains a key challenge. Herein, this study proposes a simple, one-step, mask-free and high-resolution fabrication method for high-performance 1T MoS2 MSCs in atmosphere. The method involves the direct writing of restacked 1T MoS2 films by a temporally shaped femtosecond laser. Specifically, femtosecond laser pulses are temporally shaped to control the transient electron temperature and material absorption for achieving highresolution fabrication. Excellent electrode material properties and ultrashort ion transfer distance enable the MSCs to exhibit optimal performances with an ultrahigh power density (14 kW cm(-3)), ultrahigh energy density (15.6 mWh cm(-3)) and large areal capacitance (36 mF cm(-2)). Notably, such miniaturized MSCs in a 100 x 100 mu m(2) area own superior frequency responses (1221 Hz) and time constant (0.82 ms), which are suitable for AC line filters and other high-power demanded electronic devices. This method successfully solves the problem of maintaining performance in the miniaturization of MSCs, allowing next-generation microelectronic devices to be developed.