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Quasicontinuum simulations of geometric effect on onset plasticity of nano-scale patterned lines

机译:纳米尺度图案线爆发性效果的拟临时模拟

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Onset plasticity of metallic nano-lines or nano-beams is of considerable scientific and technological interest in micro-/nano- mechanics and interconnects of patterned lines in electronic devices, where capability of resistance to deformation is important. In this study, a multiscale quasicontinuum (QC) method was used to explore such an issue in a nano-scale copper (Cu) line protruding from a relatively large single crystal Cu substrate during compression. The results show that the yield stress of a rectangular beam on the substrate can be greatly reduced compared with that of a flat surface of the same area. For the rectangular line, the aspect ratio (width/height) affects dislocation morphology at the onset plasticity without much change of yield stress. However, for the trapezoidal line, the yield stress decreases with the base angle (alpha), especially when the a is over 54.7 degrees. As the sidewall orientation changes from < 100 > at alpha = 0 degrees, then to < 111 > at alpha = 54.7 degrees and finally to < 110 > at alpha = 90 degrees, a higher surface energy could enable easier dislocation formation and lower yield stress. Meanwhile, it is found that the interaction between the line and the support substrate also shows a great effect on yield stress. Moreover, although it is possible to open two extra dislocation slip planes inside from the two bottom corners of the Cu line with the alpha over 54.7 degrees, dislocation nucleation derived from them is only observed at alpha = 90 degrees.
机译:金属纳米线或纳米梁的起始可塑性在电子器件中的微/纳米力学和互连的微/纳米力学和互连中具有相当大的科技兴趣,其中抵抗变形的能力是重要的。在该研究中,使用多尺度QuasIconum(QC)方法来探讨在压缩期间从相对大的单晶Cu衬底突出的纳米尺寸铜(Cu)管线中的这种问题。结果表明,与相同区域的平坦表面的平坦表面相比,可以大大减少矩形梁的屈服应力。对于矩形线,纵横比(宽度/高度)影响起始可塑性的位错形态,而不会改变屈服应力。然而,对于梯形线,屈服应力随基角(α)而降低,特别是当A超过54.7度时。随着侧壁取向从α= 0度的<100>改变,然后在α= 54.7度下达到<111>,最后在α= 90度下加到110℃,更高的表面能可以使得脱位形成更容易和降低屈服应力。同时,发现线和支撑基材之间的相互作用也显示出对屈服应力的巨大影响。此外,尽管可以在Cu线的两个底角内与α超过54.7度开两个额外的位错滑面,但是衍生自α= 90度的脱位成核。

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