A novel microfluidics integrated biosensor based on a MEMS resonator

摘要

In this paper a sensor based on MEMS resonators is proposed for digital microfluidics applications. The sensor system consists of a disk as active area immobilized for capturing any special particles. This disk can azimuthally vibrate by means of two in phase electrostatic actuators both sides. Two capacitive sensing elements determine the vibrating amplitude. The moving droplets by digital microfluidic module will envelope the disk of active zone, so the captured particles can change the vibration frequency of resonance. Due to azimuthal vibration, the fluidic damping is low enough to achieve measurable quality factor by resonator. The total system is simulated and the result is presented.