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Wafer-scale fabrication and characterization of thin-film transistors with polythiophene-sorted semiconducting carbon nanotube networks

机译:具有聚噻吩分类的半导体碳纳米管网络的薄膜晶体管的晶圆级制造和表征

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摘要

Semiconducting single-walled carbon nanotubes (SWCNTs) have great potential of becoming the channel material for future thin-film transistor technology. However, an effective sorting technique is needed to obtain high-quality semiconducting SWCNTs for optimal device performance. In our previous work, we reported a dispersion technique for semiconducting SWCNTs that relies on regioregular poly(3-dodecylthiophene) (rr-P3DDT) to form hybrid nanostructures. In this study, we demonstrate the scalability of those sorted CNT composite structures to form arrays of TFTs using standard lithographic techniques. The robustness of these CNT nanostructures was tested with Raman spectroscopy and atomic force microscope images. Important trends in device properties were extracted by means of electrical measurements for different CNT concentrations and channel lengths (L _c). A statistical study provided an average mobility of 1 cm ~2/V·s and I _(on)/I _(off) as high as 10 ~6 for short channel lengths (L _c = 1.5 μm) with 100% yield. This highlights the effectiveness of this sorting technique and its scalability for large-scale, flexible, and transparent display applications.
机译:半导体单壁碳纳米管(SWCNT)具有巨大的潜力,可以成为未来薄膜晶体管技术的沟道材料。但是,需要有效的分类技术来获得高质量的半导体SWCNT,以实现最佳的器件性能。在我们以前的工作中,我们报道了一种半导体SWCNT的分散技术,该技术依赖于区域规则的聚(3-十二烷基噻吩)(rr-P3DDT)形成杂化纳米结构。在这项研究中,我们演示了使用标准光刻技术将那些分类的CNT复合结构的可伸缩性形成TFT阵列的方法。这些碳纳米管纳米结构的坚固性用拉曼光谱和原子力显微镜图像进行了测试。通过电测量针对不同的CNT浓度和通道长度(L _c)提取了器件性能的重要趋势。一项统计研究显示,对于短通道长度(L _c = 1.5μm),平均迁移率为1 cm〜2 / V·s,I _(on)/ I _(off)高达10〜6,产率为100%。这凸显了这种分类技术的有效性及其在大规模,灵活和透明显示应用程序中的可伸缩性。

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