Development of Corrosion‐Resistant Pressure Sensor with Semiconductor Strain Sensor

SUZUKI KENGO; OOTA HIROYUKI; UMEYAMA TAKAHIRO

摘要

SUMMARY >In automotive and industrial fields, pressure sensors are a key component for precisely controlling the mechanical systems. Conventional micro electro mechanical system (MEMS)‐based pressure sensors have an advantage in noise resistance, because both strain gauges and control circuits are integrated in one chip. However, the MEMS‐based pressure sensors are generally fabricated on an Si substrate, and have a low stability against various active gases. Thus, we have newly proposed a pressure sensor which consists of an Si‐based strain sensor set on a stainless steel diaphragm with a high stability against the active gases. The key technology is that a Koval plate is inserted between the strain sensor and the stainless steel diaphragm, for preventing the breakage or the delamination of the strain sensor at the bonding interface due to a difference in thermal expansion. Structure of the sensor including the shape and the size of Koval plate and the assembly position of the strain sensor were designed using structural simulation and experiments. >Eventually, the 2.8 mm wide and 0.17 mm thick Koval beam was bridged on the stainless steel diaphragm for efficiently transmitting the diaphragm deformation to the strain sensor. The strain sensor was assembled at the edge of Koval beam with a glass bonding technique. Consequently, the developed pressure sensor has achieved a small dispersion of less than 1% F. S. in a temperature range from 0 °C to 85 °C. </abstract> </span> <span class="z_kbtn z_kbtnclass hoverxs" style="display: none;">展开▼</span> </div> <div class="translation abstracttxt"> <span class="zhankaihshouqi fivelineshidden" id="abstract"> <span>机译：</span><abstract xmlns =“http://www.wiley.com/namespaces/wiley”type =“main”xml：lang =“en”> <title type =“main”>摘要</ title> >在汽车中和工业领域，压力传感器是精确控制机械系统的关键部件。常规的微电机械系统（MEMS）基于压力传感器具有抗噪声的优点，因为应变仪表和控制电路都集成在一个芯片中。然而，基于MEMS的压力传感器通常在Si衬底上制造，并且具有对各种活性气体的低稳定性。因此，我们新提出了一种压力传感器，该压力传感器包括在不锈钢隔膜上设定的基于Si的应变传感器，其具有高稳定性的活性气体。关键技术是koval板在应变传感器和不锈钢隔膜之间插入，以防止由于热膨胀差异而在粘合界面处的破裂或菌株传感器的分解。使用结构模拟和实验设计了包括koval板的形状和尺寸的传感器的结构和应变传感器的组装位置。</ p> >最终，桥接2.8 mm宽和0.17mm厚的koval梁桥接在不锈钢隔膜上，用于有效地将隔膜变形透射到应变传感器。应变传感器在具有玻璃粘合技术的koval梁的边缘处组装。因此，发育的压力传感器达到小于1％F.S的小分散体。在0℃至85℃的温度范围内。</ p> </摘要> </span> <span class="z_kbtn z_kbtnclass hoverxs" style="display: none;">展开▼</span> </div> </div> <div class="record"> <h2 class="all_title" id="enpatent33" >著录项</h2> <ul> <li> <span class="lefttit">来源</span> <div style="width: 86%;vertical-align: text-top;display: inline-block;"> <a href='/journal-foreign-22399/'>《Electrical engineering in Japan》</a> <b style="margin: 0 2px;">|</b><span>2018年第2期</span><b style="margin: 0 2px;">|</b><span>共8页</span> </div> </li> <li> <div class="author"> <span class="lefttit">作者</span> <p id="fAuthorthree" class="threelineshidden zhankaihshouqi"> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=SUZUKI KENGO&option=202" target="_blank" rel="nofollow">SUZUKI KENGO;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=OOTA HIROYUKI&option=202" target="_blank" rel="nofollow">OOTA HIROYUKI;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=UMEYAMA TAKAHIRO&option=202" target="_blank" rel="nofollow">UMEYAMA TAKAHIRO;</a> </p> <span class="z_kbtnclass z_kbtnclassall hoverxs" id="zkzz" style="display: none;">展开▼</span> </div> </li> <li> <div style="display: flex;"> <span class="lefttit">作者单位</span> <div style="position: relative;margin-left: 3px;max-width: 639px;"> <div class="threelineshidden zhankaihshouqi" id="fOrgthree"> <p>Hitachi Ltd.Japan;</p> <p>Hitachi Ltd.Japan;</p> <p>Hitachi Metals Fine Tech LtdJapan;</p> </div> <span class="z_kbtnclass z_kbtnclassall hoverxs" id="zhdw" style="display: none;">展开▼</span> </div> </div> </li> <li > <span class="lefttit">收录信息</span> <span style="width: 86%;vertical-align: text-top;display: inline-block;"></span> </li> <li> <span class="lefttit">原文格式</span> <span>PDF</span> </li> <li> <span class="lefttit">正文语种</span> <span>eng</span> </li> <li> <span class="lefttit">中图分类</span> <span><a href="https://www.zhangqiaokeyan.com/clc/1782.html" title="输配电工程、电力网及电力系统">输配电工程、电力网及电力系统;</a></span> </li> <li class="antistop"> <span class="lefttit">关键词</span> <p style="width: 86%;vertical-align: text-top;"> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=pressure sensor&option=203" rel="nofollow">pressure sensor;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=corrosion‐resistant&option=203" rel="nofollow">corrosion‐resistant;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=strain sensor&option=203" rel="nofollow">strain sensor;</a> </p> <div class="translation"> 机译：压力传感器;耐腐蚀;应变传感器; </div> </li> </ul> </div> </div> <div class="literature cardcommon" id="literaturereference" style="display:none"> <div class="similarity "> <h3 class="all_title" id="enpatent111">引文网络</h3> <div class="referencetab clearfix"> <ul id="referencedaohang"> <li dataid="referenceul">参考文献</li> <li dataid="citationul">引证文献</li> <li dataid="commonreferenceul">共引文献</li> <li dataid="commoncitationul">同被引文献</li> <li dataid="tworeferenceul">二级参考文献</li> <li dataid="twocitationul">二级引证文献</li> </ul> </div> <div class="reference_details" id="referenceList"> <ul id="referenceul"></ul> <ul id="citationul"></ul> <ul id="commonreferenceul"></ul> <ul id="commoncitationul"></ul> <ul id="tworeferenceul"></ul> <ul id="twocitationul"></ul> </div> </div> </div> <div class="literature cardcommon"> <div class="similarity "> <h3 class="all_title" id="enpatent66">相似文献</h3> <div class="similaritytab clearfix"> <ul> <li class="active" >外文文献</li> <li >中文文献</li> <li >专利</li> </ul> </div> <div class="similarity_details"> <ul > <li> <div> <b>1. </b><a class="enjiyixqcontent" href="/journal-foreign-detail/0704023149829.html">Development of Corrosion‐Resistant Pressure Sensor with Semiconductor Strain Sensor</a> <b>[J]</b> . <span> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=SUZUKI KENGO&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor">SUZUKI KENGO,</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=OOTA HIROYUKI&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor">OOTA HIROYUKI,</a> <a 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2015</span><span>,第003期</span> </span> </div> </li> <li> <div> <b>6. </b><a class="enjiyixqcontent" href="/academic-conference-cn_meeting-33030_thesis/02022733386.html">高温耐腐蚀压力传感器密封技术研究</a> <b>[C]</b> <span> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=陶文中&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor"> . 陶文中</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=李娟&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor">,李娟</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=王长虹&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor">,王长虹</a> <span> <a href="/conference-cn-33030/" target="_blank" rel="nofollow" class="tuijian_authcolor"> . 第六届全国敏感元件与传感器学术会议 </a> <span> <span> . 1999</span> </span> </div> </li> <li> <div> <b>7. </b><a class="enjiyixqcontent" href="/academic-degree-domestic_mphd_thesis/020311979733.html">一种具有防烧蚀功能半导体激光-光纤耦合器的研制</a> <b>[A] </b> <span> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=杜章永&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor"> . 杜章永</a> <span> . 2008</span> </span> </div> </li> </ul> <ul style="display: none;"> <li> <div> <b>1. </b><a class="enjiyixqcontent" href="/patent-detail/06120211954362.html">具备具有耐腐蚀性的磁体的压力传感器</a> <b>[P]</b> . <span> 中国专利： CN211927164U </span> <span> . 2020-11-13</span> </div> </li> <li> <div> <b>2. </b><a class="enjiyixqcontent" href="/patent-detail/06120106518533.html">具有半导体压力测量换能器的压力传感器</a> <b>[P]</b> . <span> 中国专利： CN102334019A </span> <span> . 2012-01-25</span> </div> </li> <li> <div> <b>3. </b><a class="enjiyixqcontent" href="/patent-detail/06130426418701.html">FLEXIBLE FORCE OR PRESSURE SENSOR ARRAY USING SEMICONDUCTOR STRAIN GAUGE, MANUFACTURING METHOD OF FLEXIBLE FORCE OR PRESSURE SENSOR ARRAY, AND FORCE OR PRESSURE MEASUREMENT METHOD USING FLEXIBLE FORCE OR PRESSURE SENSOR ARRAY</a> <b>[P]</b> . <span> 外国专利：  JP2011197001A </span> <span> . 2011-10-06</span> </div> <p class="zwjiyix translation" style="max-width: initial;height: auto;word-break: break-all;white-space: initial;text-overflow: initial;overflow: initial;"> <span>机译：使用半导体应变仪的柔性力或压力传感器阵列，柔性力或压力传感器阵列的制造方法以及使用柔性力或压力传感器阵列的力或压力测量方法 </span> </p> </li> <li> <div> <b>4. </b><a class="enjiyixqcontent" href="/patent-detail/06130464357533.html">Pressure sensor with film resistance strain gauge - has ceramic plate with corrosion and abrasion resistant insulation cover plate</a> <b>[P]</b> . <span> 外国专利：  DE3918818A1 </span> <span> . 1990-12-13</span> </div> <p class="zwjiyix translation" style="max-width: initial;height: auto;word-break: break-all;white-space: initial;text-overflow: initial;overflow: initial;"> <span>机译：带有薄膜电阻应变片的压力传感器-带有陶瓷板，带腐蚀和耐磨的绝缘盖板 </span> </p> </li> <li> <div> <b>5. </b><a class="enjiyixqcontent" href="/patent-detail/06130445863759.html">Semiconductor pressure sensor for e.g., as intake pressure sensor in vehicle engine intake, has semiconductor substrate, diaphragm portion, strain gauge, circuit portion, and local oxidation of silicon film</a> <b>[P]</b> . <span> 外国专利：  DE10128577A1 </span> <span> . 2001-12-20</span> </div> <p class="zwjiyix translation" style="max-width: initial;height: auto;word-break: break-all;white-space: initial;text-overflow: initial;overflow: initial;"> <span>机译：半导体压力传感器，例如，作为车辆发动机进气中的进气压力传感器，具有半导体基板，膜片部分，应变仪，电路部分以及硅膜的局部氧化 </span> </p> </li> </ul> </div> </div> </div> <div class="theme cardcommon" style="overflow: auto;display:none"> <h3 class="all_title" id="enpatent55">相关主题</h3> <ul id="subject"> </ul> </div> </div> </div> </div> <div class="right rightcon"> <div class="details_img cardcommon clearfix" style="margin-bottom: 10px;display:none;" > </div> </div> </div> <div id="thesis_get_original1" class="downloadBth" style="bottom: 19px;z-index: 999;" onclick="ywcd('0704023149829','4',7,2,1,'',this,24)" class="delivery" prompt="010401" title="通过人工服务将文献原文发送至邮箱" 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