Communication-Silicon Narrow-Band Solar-Blind Ultraviolet Detector Based on Ag-SiO2-Si Capacitor

摘要

Solar-blind narrow-band silicon ultraviolet photodetectors based on metal-oxide-semiconductor (MOS) capacitors with silver gate are presented. A very high selectivity was obtained using silver as the band-pass filter. An optimal relationship between the layer and silver film thicknesses was found to obtain a spectral response with a bandwidth of 20 nm at 320 nm and four/five orders rejection factor for the rest of the spectrum. Capacitors operate in non-equilibrium inversion mode that allows to obtaining an internal amplification of photocurrent, up to 10(6), for a weak input optical signal due to a time compression between the charge storage and readout operating modes. (C) 2017 The Electrochemical Society. All rights reserved.