Study of Structural and Morphological Properties of ZnO Thin Films Prepared by Chemical Bath Deposition Technique

摘要

ZnO thin films have been deposited on glass substrates by chemical bath deposition technique using aqueous solution of Zinc Sulphate (ZnSO4) as a starting material and triethylamine (N(CH2CH3))as a complexing agent. The thickness of the films was found to be about 1.02 um. The XRD analysis of the thin film revealed that the ZnO films are of polycrystalline nature with grain size in the order of nanometers and has hexagonal structure with orientation of c- axis. The average particle size of the film as estimated from XRD peaks were found to be 28.3687nm. SEM studies indicate that the grains are not uniformly distributed and not well connected to each other. The EDAX spectrum shows that the films are nearly phase pure containing a few other impurities.