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Modular High-Intensity Monochromatic In Situ Illumination Set-Up for Investigating ESR Photoactive Centers in Semiconductors

机译:用于在半导体中调查ESR光活性中心的模块化高强度单色的原位照明设置

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摘要

A versatile, modular in situ high-intensity monochromatic illumination set-up installed on a standard Q-band ESR spectrometer equipped with a cryostat and probe head for measurements at cryogenic temperatures, which can be easily assembled from commercially available optical components is presented. Using as monochromatic light sources pig-tailed laser diodes (LDs) or fiber-coupled light-emitting diodes (LEDs), a high efficiency of the light transfer (more than 95%) through an optical guide inserted in the sample holder is achieved in the sample area of the microwave cavity. With various LEDs and LDs, one can perform ESR in situ illumination experiments from UV to far-IR, in both cw and pulse mode. Its operation is illustrated with an experiment revealing the presence of certain ESR silent defects in oxygen-doped floating-zone ultrapure Si samples irradiated at room temperature with high-energy-high-fluence electron beams and pulse annealed up to 300 degrees C. New information is obtained by comparing the ESR spectra recorded at T = 120 K, without and with 1.06 mu m across-the-gap in situ illumination.
机译:呈现在配备有低温恒温器和探针头的标准Q频带ESR光谱仪上的多功能,模块化的原位高强度单色照明装置,可以在低温温度下进行测量,这可以从市售的光学部件容易地组装。使用作为单色光源猪尾激光二极管(LDS)或光纤耦合发光二极管(LED),通过插入样品支架中的光学导向器的光传输(大于95%)的高效率微波腔的样品区域。对于各种LED和LD,可以在CW和脉冲模式下从UV到FAR-IR的原位照明实验中执行ESR。其操作用实验说明了在室温下在室温下照射的氧掺杂浮区超纯样品的某些ESR沉默缺陷的存在,高能量高流量的电子束和脉冲退火最多300摄氏度。新信息通过将记录在T = 120k的ESR光谱比较,而没有并在原位照明的差距中进行比较。

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