NEW ATMOSPHERIC PRESSURE MICROWAVE MICROPLASMA SOURCE

摘要

A simple microwave microplasma source (MMS) for the generation of argon microplasma at atmospheric pressure is presented. The presented MMS can be used in practical applications including the gas cleaning, microwelding, surface modifications and biomedical applications. The MMS, of a coaxial design, was supplied through 50 Ω coaxial line terminated with a coaxial MMS from a typical 2.45 GHz microwave magnetron generator. All experimental tests were performed with argon at a flow rate from 1 to 20 l/min and absorbed microwave power from 10 to 80 W. The microplasma occurred in the form of a small plasma jet. The length and diameter of microplasma ranged from 1.5-14 mm and 0.5-1.5 mm, respectively, depending on the discharge condition. The temperature of the microplasma could be changed in the range of 30-1200 ℃ by varying the gas flow rate and/or absorbed microwave power.