Modelling of Surface Assimilation of Water in Load Lock Vacuum System

摘要

Lot of attention has been paid to the investigations on adsorption and desorption processes in view of determining purity and migration of various fluids for vacuum systems. In the present work, modeling of adsorption and desorption mechanisms of water in vacuum system under low pressures have been carried out. Further, time dependent analyses of adsorption and desorption of water molecules under different pressures for realization of load lock vacuum system with water migration and pumping have been simulated. From the analyses of results, it has been observed that adsorption of molecules found to decrease gradually which was discussed in detail by considering two specific points such as high vacuum and load lock systems with sticking coefficients and corresponding pressure drop between chambers. Another interesting observation is that pressure drops slowly for the first three hours of pumping, after which abrupt decrease in pressure due to residual pumped water was resulted. COMSOL Multiphysics software tool v 4.4 was used to model the proposed design. These studies would be more useful to develop the non-sticky coatings in biomedical devices and also to control and deliver fluids in various industrial applications.