Load lock chambers, vacuum processing systems with load lock chambers, and methods for vacuum evacuating load lock chambers

摘要

A load lock chamber 100 for a vacuum processing system 500 is described. The load lock chamber includes load lock walls surrounding the load lock chamber volume, the load lock walls including a first load lock wall (101) and a second load lock wall (102) 102 are arranged opposite to the first load lock wall 101. The load lock chamber further includes at least one first vacuum suction outlet (110) and at least one second vacuum suction outlet (111) for evacuating the load lock chamber (100); At least one first vacuum suction outlet 110 is located in the first load lock wall 101 and at least one second vacuum suction outlet 111 is located in the second load lock wall 102. In addition, a method for vacuum evacuation of a vacuum processing system and a load lock chamber is described.