MEMS-based microheaters integrated gas sensors

摘要

In the present work efforts have been made to develop microheater integrated gas sensors with low power consumption. The design and simulation of a single-cell microheater is carried out using ANSYS. Low power consumption (<35mW) platinum micro-heater has been fabricated using bulk micromachining technique on silicon dioxide membrane (1.5m thin), which provided improved thermal isolation of the active area of 250x250m(2). The micro-heater has achieved a maximum temperature of similar to 950 degrees C at an applied dc voltage of 2.5V. Fabricated mircro-heater has been integrated with SnO2 based gas sensors for the efficient detection of H-2 and NO2 gases. The developed sensors were found to yield the maximum sensing response of similar to 184 and similar to 2.1 with low power consumption of 29.18 and 34.53mW towards the detection of 1ppm of NO2 gas and 500ppm of H-2 gas, respectively.