Characterization of BLT Films Formed by Using a Flash-Annealing Process on Pt/(Cr, Ti)N/TiN/Ti Bottom Electrode

摘要

Ferroelectric Bi_(4-x)La_xTi_3O_(12) (BLT) films were prepared by using a sol-gel method on Pt/(Cr, Ti)N/TiN/Ti bottom electrode. The BLT films crystallized by a flash-annealing (750 deg C, 30 sec, O_2) were found to show excellent shapes of hysteresis loop in the P-E (polarization vs. field) characteristics. It was also found that the recovery-annealing (600 deg C, 60 min, O_2) after the flash-annealing was exceedingly effective to decrease the leakage current of the films and to keep the ferroelectric property good.