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METHOD FOR FABRICATION OF HIGH-QUALITY GRAPHENE DEVICES

机译:高质量石墨烯设备的制造方法

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摘要

Since its experimental isolation on insulating substrates in 2004, graphene has grabbed attention of scientists across the world due to its extraordinary physical and chemical properties. One of the most promising areas for its application is electronics, where electric conductivity can be used to design novel and fast devices. However, graphene material is very sensitive to surface contaminants including resist residues left by lithographical processes. A group of scientists are investigating lithography free processes to avoid such technical problems.
机译:自2004年对绝缘基板进行实验隔离以来,石墨烯因其非凡的物理和化学特性而受到了全世界科学家的关注。电子应用最有前景的领域之一是电子学,其中电导率可用于设计新颖,快速的设备。然而,石墨烯材料对表面污染物非常敏感,包括光刻工艺留下的抗蚀剂残留物。一组科学家正在研究无光刻工艺,以避免此类技术问题。

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