On‐Demand Preparation of α‐Phase‐Dominated Tungsten Films for Highly Qualified Thermal Reflectors

Wang Xiaoyu; Zang Rui; Gao Junhua; Liu Chen; Wang Lei; Gong Wenbin; Zha Xianhu; Chen Xingqiu; Huang Feng; Javaid Kashif; Xu Zhi; Cao Hongtao; Rogachev Alexander A.

摘要

Abstract > Phase‐structure diversity affords tungsten thin films with fascinating physical/chemical properties for varied applications. However, the on‐demand preparation of W films with specific phase is still an important but unmet scientific issue. In this report, an easy‐to‐achieve preparation recipe is implemented for addressing the phase tailoring of tungsten films. The phase transformation evolution during deposition is governed by enhanced diffusion of W adatoms and selective atomic etching on the crystal planes. It is experimentally demonstrated that the orientation relation between {210} <sub>β</sub> and {110} <sub>α</sub> planes plays a vital role in coupling with the competitive growth behaviors between β‐ and α‐W. The phase‐dependent electrical/optical properties of W films are experimentally observed and unambiguously figured out by theoretical simulations. Alpha‐phase‐dominated W films are prepared successfully under relatively tolerant conditions, demonstrating a low resistivity of ≈13.6 μΩ cm and a high infrared reflectance larger than 93%. Alpha‐W also serves as thermal reflector to construct a solar absorber, exhibiting a low thermal emissivity of ≈9.8%@500 °C. Understanding the (α, β) phase transformation mechanism means a big step forward in the development of the on‐demand preparation, which allows to build a scalable platform for making W films with specific phase in a more controllable way. </abstract> </span> <span class="z_kbtn z_kbtnclass hoverxs" style="display: none;">展开▼</span> </div> <div class="translation abstracttxt"> <span class="zhankaihshouqi fivelineshidden" id="abstract"> <span>机译：</span><Abstract Type =“Main”XML：Lang =“en”> <标题类型=“main”>抽象</ title> > 相结构多样性提供钨薄膜，具有迷人的物理/化学性质，用于各种应用。然而，具有特定阶段的W薄膜的按需制备仍然是一个重要但未征收的科学问题。在本报告中，实施了易于实现的制备配方，用于解决钨膜的阶段剪裁。沉积期间的相变化通过WADATOM的增强扩散和在晶体平面上的选择性原子蚀刻来控制。实验证明{210}之间的方向关系 <sub>β</ sub> 和{110} <sub>α</ sub> 平面在耦合与β-和α-W之间的竞争生长行为中起着至关重要的作用。通过理论模拟实验观察和明确地观察W膜的相位依赖性电气/光学性质。 α相位主导的W薄膜在相对容忍的条件下成功制备，在≈13.6μΩcm的低电阻率和大于93％的高红外反射率。 Alpha-W还用作热反射器，以构建太阳能吸收器，呈现出低热发射率为≈9.8％@ 500°C。理解（α，β）相变机构意味着在按需制备的开发中向前一步，这允许以更可控的方式构建用于使具有特定相位的W薄膜的可伸缩平台。 </ p> </摘要> </span> <span class="z_kbtn z_kbtnclass hoverxs" style="display: none;">展开▼</span> </div> </div> <div class="record"> <h2 class="all_title" id="enpatent33" >著录项</h2> <ul> <li> <span class="lefttit">来源</span> <div style="width: 86%;vertical-align: text-top;display: inline-block;"> <a href='/journal-foreign-18063/'>《Advanced materials interfaces》</a> <b style="margin: 0 2px;">|</b><span>2019年第11期</span><b style="margin: 0 2px;">|</b><span>共12页</span> </div> </li> <li> <div class="author"> <span class="lefttit">作者</span> <p id="fAuthorthree" class="threelineshidden zhankaihshouqi"> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Wang Xiaoyu&option=202" target="_blank" rel="nofollow">Wang Xiaoyu;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Zang Rui&option=202" target="_blank" rel="nofollow">Zang Rui;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Gao Junhua&option=202" target="_blank" rel="nofollow">Gao Junhua;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Liu Chen&option=202" target="_blank" rel="nofollow">Liu Chen;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Wang Lei&option=202" target="_blank" rel="nofollow">Wang Lei;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Gong Wenbin&option=202" target="_blank" rel="nofollow">Gong Wenbin;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Zha Xianhu&option=202" target="_blank" rel="nofollow">Zha Xianhu;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Chen Xingqiu&option=202" target="_blank" rel="nofollow">Chen Xingqiu;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Huang Feng&option=202" target="_blank" rel="nofollow">Huang Feng;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Javaid Kashif&option=202" target="_blank" rel="nofollow">Javaid Kashif;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Xu Zhi&option=202" target="_blank" rel="nofollow">Xu Zhi;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Cao Hongtao&option=202" target="_blank" rel="nofollow">Cao Hongtao;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Rogachev Alexander A.&option=202" target="_blank" rel="nofollow">Rogachev Alexander A.;</a> </p> <span class="z_kbtnclass z_kbtnclassall hoverxs" id="zkzz" style="display: none;">展开▼</span> </div> </li> <li> <div style="display: flex;"> <span class="lefttit">作者单位</span> <div style="position: relative;margin-left: 3px;max-width: 639px;"> <div class="threelineshidden zhankaihshouqi" id="fOrgthree"> <p>Key Laboratory of Graphene Technologies and Applications of Zhejiang ProvinceChinese Academy of SciencesNingbo 315201 China;</p> <p>Key Laboratory of Graphene Technologies and Applications of Zhejiang ProvinceChinese Academy of SciencesNingbo 315201 China;</p> <p>Key Laboratory of Graphene Technologies and Applications of Zhejiang ProvinceChinese Academy of SciencesNingbo 315201 China;</p> <p>Shenyang National Laboratory for Materials ScienceChinese Academy of SciencesShenyang 110016 China;</p> <p>Shenyang National Laboratory for Materials ScienceChinese Academy of SciencesShenyang 110016 China;</p> <p>Key Laboratory of Nanodevices and ApplicationsChinese Academy of SciencesSuzhou 215123 China;</p> <p>Engineering Laboratory of Nuclear Energy MaterialsChinese Academy of SciencesNingbo 315201 China;</p> <p>Shenyang National Laboratory for Materials ScienceChinese Academy of SciencesShenyang 110016 China;</p> <p>Engineering Laboratory of Nuclear Energy MaterialsChinese Academy of SciencesNingbo 315201 China;</p> <p>Key Laboratory of Graphene Technologies and Applications of Zhejiang ProvinceChinese Academy of SciencesNingbo 315201 China;</p> <p>Beijing National Laboratory for Condensed Matter PhysicsChinese Academy of SciencesBeijing 100190 China;</p> <p>Key Laboratory of Graphene Technologies and Applications of Zhejiang ProvinceChinese Academy of SciencesNingbo 315201 China;</p> <p>Francisk Skorina Gomel State UniversityGomel 246019 Belarus;</p> </div> <span class="z_kbtnclass z_kbtnclassall hoverxs" id="zhdw" style="display: none;">展开▼</span> </div> </div> </li> <li > <span class="lefttit">收录信息</span> <span style="width: 86%;vertical-align: text-top;display: inline-block;"></span> </li> <li> <span class="lefttit">原文格式</span> <span>PDF</span> </li> <li> <span class="lefttit">正文语种</span> <span>eng</span> </li> <li> <span class="lefttit">中图分类</span> <span><a href="https://www.zhangqiaokeyan.com/clc/6960.html" title="特种结构材料">特种结构材料;</a></span> </li> <li class="antistop"> <span class="lefttit">关键词</span> <p style="width: 86%;vertical-align: text-top;"> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=first‐principles calculation&option=203" rel="nofollow">first‐principles calculation;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=infrared reflectance&option=203" rel="nofollow">infrared reflectance;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=phase transformation&option=203" rel="nofollow">phase transformation;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=resistivity&option=203" rel="nofollow">resistivity;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=thermal reflector&option=203" rel="nofollow">thermal reflector;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=tungsten thin film&option=203" rel="nofollow">tungsten thin film;</a> </p> <div class="translation"> 机译：第一原理计算;红外反射率;相变;电阻率;热反射器;钨薄膜; </div> </li> </ul> </div> </div> <div class="literature cardcommon"> <div class="similarity "> <h3 class="all_title" id="enpatent66">相似文献</h3> <div class="similaritytab clearfix"> <ul> <li class="active" >外文文献</li> <li >中文文献</li> <li >专利</li> </ul> </div> <div 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