Effect of a Platinum Sublayer on the Microstructure and Spontaneous Polarization of Thin Lithium Niobate Films Deposited on a Silicon Substrate

摘要

the microstructure, value of self-polarization, and local piezoelectric hysteresis loops of LiNbO~(3)thin films synthesized on silicon substrates with a native SiO~( x )layer and with a platinum layer are compared via scanning probe microscopy. It is found that smoother surfaces, smaller grain sizes, and a simultaneous higher self-polarization value and effective piezoelectric coefficient are typical of LiNbO~(3)films applied to a silicon substrate with a platinum sublayer.