Effect of deposition times of buffer layer on the structural and optical properties of AZO film on the polyethylene terephthalate substrates

摘要

The aluminium-doped zinc oxide with buffer layer films were deposited on the polyethylene terephthalate substrates by radiofrequency magnetron sputtering. Compared with the AZO films without buffer layer, the crystallite size and (002) peak of the films changed with the deposition times; the full-width at half-maximum (FWHM) of (002) peak decreases from 0 to 25 min. The effects of buffer layer on the surface morphology of and optical properties of films were investigated by SEM and UV-Vis-NIR spectrophotometer, respectively. The results reveal that the average transmittance of the AZO films in the visible wavelength region is , stronger deep level emissions centred on 550 nm is attributed to intrinsic defects in the AZO films on the organic polymer PET substrates.