Property Optimization of the Micro-Bolometer Array Designed by Associating Noise Equivalent Temperature Difference and Resistance Equation

摘要

We present how to optimize efficiently the performance of micro-bolometer array with design parameters such as active area and channel length, and minimize simultaneously the channel resistance of bolometer array with a minimum channel area and length in a given technology and technology window. The results demonstrate that the serpentine is very efficient pattern to minimize the channel since it provides a large area or path through which electron or holes conducts as easy as possible, as well as it maintains a relatively large absorption area in a given pixel area. On the other hand, these approach have also much large effects on the flicker noise reduction because amorphous Si active layer has about 20 M ohm/square which causing an insufficient current level in an array circuits, however, any dopants does not need to reduce resistance of micro-bolometer channel.