Inkjet-printed silver as alternative top electrode for lead zirconate titanate thin films

摘要

In the present work, we describe direct patterning of silver top electrodes on polycrystalline Pb(Zr0.53Ti0.47)O-3 (PZT) thin films via inkjet printing. The films were first deposited on platinized silicon via chemical solution deposition. Individual nanosilver ink droplets were then printed on the PZT surface to create round top electrodes with tunable diameter from 75 to 93 mu m. Printing parameters and strategy were optimized for deposition of homogeneous electrodes. High quality of the printed silver electrodes sintered at 350 degrees C is confirmed via measurements of the direct piezoelectric response and polarization loops of PZT thin films, whose results are comparable to the ones obtained for sputtered platinum top electrodes, with e(31,)(f) = -4.1 C m(-2), P-r similar to 20 mu C cm(-2) and E-c similar to 55 kV cm(-1). (C) 2019 Elsevier B.V. All rights reserved.