Materials containing benzocyclobutene units with low dielectric constant and good thermostability prepared from star-shaped molecules

摘要

With the development of ultralarge-scale integrated circuits, polymers with low dielectric constant and high thermal stability have aroused great interest. We prepared two novel bridged siloxane-based benzocyclobutene (BCB) star-shaped monomers, tetrakis[dimethyl siloxy-4-(1 ',1 '-dimethyl-1 '-ethyl silicon)-benzocyclobutene] (TDSDES-BCB) and tetrakis(hexamethyl siloxane vinyl-benzocyclobutene) (THSV-BCB), and the corresponding resins were obtained by curing. The structures of TDSDES-BCB and THSV-BCB were confirmed by H-1-NMR, C-13-NMR, and Si-29-NMR spectra and time-of-flight mass spectrometry analysis. The curing behavior of these monomers was investigated by Fourier transform infrared spectroscopy and differential scanning calorimetry. The dielectric constant of cured TDSDES-BCB is only 2.43 at 10 MHz (that of THSV-BCB is 2.46). In addition, these resins display high thermal stability: the 5 wt % weight loss temperature of cured TDSDES-BCB is about 467 degrees C (454 degrees C for THSV-BCB resin). The excellent low dielectric property is attributable to the free volume created by the star-shaped structure and crosslinked network structure of BCB after curing. (c) 2019 Wiley Periodicals, Inc. J. Appl. Polym. Sci. 2019, 136, 47458.