Growth and characterization of in-situ formed Fe-TiN nanocomposite sputter-deposited coatings

摘要

Iron-rich nanocomposite Fe-Ti-N coatings are deposited by reactive direct-current magnetron sputtering. Co deposition from two targets (Fe and Ti) onto substrates placed at different locations gives a combinatorial approach to film composition effects, with the Fe/Ti atomic ratio varying from 0.5 to 38. The influence of substrate-temperature is also studied. The nanohardness of the coatings increases with Fe content, and is as high as similar to 15 GPa, far exceeding the value for pure-iron, and comparable alloy coatings. The nanowear resistance of the coatings scales as expected with their hardness, but their abrasive wear resistance is dependent on their adhesion to the substrate.