High-temperature studies on Mo-Si multilayers using transmission electron microscope

摘要

In the present investigation we have carried out studies on thermally-induced phase transformations in Mo-Si multilayer. The microstructural characterizations were carried out on samples deposited on copper grids and heated in situ, using a transmission electron microscope. We have found that at temperatures above 400degreesC, the sample starts transforming to crystalline phase. Almost complete transformation of Mo-Si multilayer takes place at around 750degreesC to the Mo5Si3 phase.