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Development of a high vacuum cantilever beam magnetometer for measurement of mechanical and magnetic properties of thin films

机译:开发用于测量薄膜机械和磁性能的高真空悬臂梁磁力计

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摘要

The cantilever beam magnetometer (CBM) is an apparatus by means of which in situ measurement of the mechanical and magnetic properties of thin films can be made. We report here on the development of a cost-effective home-built CBM set-up under the high vacuum conditions and demonstrate its ability to measure intrinsic stress during the growth of magneticon-magnetic thin films and thereafter the magnetization of the magnetic films as a function of the magnetic field. The reproducible performance ofthe set-up has been demonstrated with various magnetic and non-magnetic films deposited on the p-Si(100) substrates.
机译:悬臂梁磁力计(CBM)是一种仪器,通过它可以现场测量薄膜的机械和磁性。我们在这里报告了在高真空条件下经济高效的自制CBM装置的开发情况,并展示了其在磁性/非磁性薄膜生长以及随后磁性膜磁化过程中测量固有应力的能力作为磁场的函数。用沉积在p-Si(100)基板上的各种磁性和非磁性膜已经证明了该装置的可再现性能。

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