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Nano patterning and fabrication of single polypyrrole nanowires by electron beam lithography

机译:电子束光刻纳米图案化和制造单个聚吡咯纳米线

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摘要

In this paper, fabrication of nanostructures of conducting polypyrrole (PPy) thin films on the surfaces by in situ chemical polymerization in the presence of different anionic dopants including anthraquinone-2-sulfonic acid sodium salt monohydrate/5-sulfosalicylic acid dehydrate (AQSANa/SSCA) and camphor sulfonic acid (CSA) is reported. "Lift-off process" combined with electron beam lithography (EBL) is used for fabrication of nano patterns of conducting PPy thin films down to 100 nm. In addition, the ability to create ordered single PPy nanowires of controlled dimension, with very high aspect ratio, and dendrite free features between Au electrodes for fabricating of field effect transistor (FET) was demonstrated by single wires of PPy-CSA and PPy(AQSANa,SSCA) with 250 nm widths, up to 12 pm lengths and 100 nm thickness. I-V measurements of both single PPy-CSA ((similar to)124 S/cm) and PPy-(AQSANa,SSCA) ((similar to)5 S/cm) nanowires indicated Ohmic or space charge limited conduction, depending on the applied bias on the contact electrodes. A considerable modulation in the electrical conductivity of PPy-CSA and PPy-(AQSANa,SSCA) nanowire p-FETs was demonstrated as a result of varying the gate potential. Both PPy-CSA and PPy-(AQSANa,SSCA) nanowire p-FETs provide good performance transistors, nevertheless show different device electrical characteristics due to used different anionic dopants.
机译:在本文中,在不同阴离子掺杂剂存在下,在不同阴离子掺杂剂存在下,在外表面上进行纳米结构的纳米结构在表面存在下,包括蒽醌-2-磺酸钠盐一水合物/ 5-磺酰水杨酸脱水(aqsanaana / ssca报道了樟脑磺酸(CSA)。与电子束光刻(EBL)相结合的“剥离过程”用于制造导电下至100nm的PPY薄膜的纳米图案。此外,通过PPY-CSA和PPY的单线证明了用于制造用于制造场效应晶体管(FET)的非常高的纵横比的有序单个PPY纳米线和Au电极之间的枝晶自由特征(AQSANA SSCA)具有250nm的宽度,长达12pm长度和100nm厚度。 IV测量单个PPY-CSA((类似于)124 s / cm)和ppy-(aqsana,ssca)((类似于)5 s / cm)纳米线,指示欧姆或空间电荷有限的传导,这取决于所施加的偏差在接触电极上。由于改变栅极电位,证明了PPY-CSA和PPY-(AQSANA,SSCA)纳米线PFET的电导率的相当大的调制。 PPY-CSA和PPY-(AQSANA,SSCA)纳米线PFET提供良好的性能晶体​​管,尽管如此,由于使用不同的阴离子掺杂剂,因此显示出不同的器件电气特性。

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