New corn-based sacrificial layer for MEMS based on screen-printed PZT ceramics

摘要

This paper demonstrates the use of a new screen-printed corn starch-based sacrificial layer that decomposes entirely thermally at similar to 550 degrees C. A comparison with a polyester-based sacrificial layer used in previous work is made. Both are used to make PZT microcantilevers and discs in a fully screen-printed fabrication process. Both designs are released during the sintering of the ceramics at 900 degrees C using the new sacrificial layer, with porosities of 6.7% and 2.2% for microcantilevers and discs, respectively. (C) 2019 Published by Elsevier B.V.