MEMS pressure sensor based on optical Fabry-Perot interference

摘要

In this paper, we present a microelectromechanical systems pressure sensor based on Fabry-Perot interference using anodic bonding, and the design principles and basic mechanical model are introduced. It is found that there is a difference between the experimental and theoretical deflections; thus, it is necessary to consider the actual structure. Furthermore, the sensor is fabricated using lithography, etching, and anodic bonding. Within the pressure measurement range of 0-0.1 MPa, the linearity is 99.996%, and the sensitivity is 74.6 nm MPa-1. The test results indicate that the deflection is consistent with the theoretical analysis. (C) 2018 Elsevier GmbH. All rights reserved.