Circular ripple patterns on silicon induced by bubble-diffracted femtosecond laser pulses in liquid

摘要

We report on a new technique of silicon surface nanostructuring in liquid with a pair of Gaussian-shaped femtosecond laser pulses. The bubble, generated in liquid near the molten silicon surface by the first pulse, serves as a dynamic microscale obstacle for spatial modulation of the intensity profile of the second pulse following at a certain delay via scattering processes. As a result, the circular ripple patterns with anomalously high surface-relief modulation, undersurface annular nanocavities, and interfacial smoothness are produced at the surface. The possibility of the control over the specific pattern through the laser intensity variation is shown. (C) 2020 Optical Society of America