Interferometry with flexible point source array for measuring complex freeform surface and its design algorithm

摘要

The precision of the measurements of aspheric and freeform surfaces remains the primary factor restrict their manufacture and application. One effective means of measuring such surfaces involves using reference or probe beams with angle modulation, such as tilted-wave-interferometer (TWI). It is necessary to improve the measurement efficiency by obtaining the optimum point source array for different pieces before TWI measurements. For purpose of forming a point source array based on the gradients of different surfaces under test, we established a mathematical model describing the relationship between the point source array and the test surface. However, the optimal point sources are irregularly distributed. In order to achieve a flexible point source array according to the gradient of test surface, a novel interference setup using fiber array is proposed in which every point source can be independently controlled on and off. Simulations and the actual measurement examples of two different surfaces are given in this paper to verify the mathematical model. Finally, we performed an experiment of testing an off-axis ellipsoidal surface that proved the validity of the proposed interference system.