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Fast phase retrieval with four-quadrant analysis in phase-shifting interferometry with blind phase shifts

机译:具有盲相移位的相移干涉测量中的四象分分析快速相位检索

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摘要

Phase-shifting interferometry (PSI) is one of the most effective techniques in optical measurement, in which phase retrieval with high efficiency is an important procedure. In this paper, a simple non-iterative method is proposed to extract the generalized phase shift with the four-quadrant analysis in three-frame PSI. In this method, the possible value of the phase shift is firstly worked out with the inner product algorithm, and then a criterion is put forward to accurately determine its principal value within the range [0, 2 pi], based on the change relationship of the interference wave vector in four quadrants. Thus, this method provides a possible method to solve the uncertainty of phase shift existing in some common algorithms. Subsequently, the phase can be retrieved easily without any other measurements. Both simulation and experimental results have fully proved the feasibility and high accuracy of the method. Moreover, it works well on open-and closed-fringed patterns. (C) 2017 Elsevier B.V. All rights reserved.
机译:相移干涉(PSI)是在光学测量的最有效的技术,其中以高效率的相位恢复是一个重要的步骤之一。在本文中,一个简单的非迭代法,提出了提取与在三帧的PSI四象限分析广义相移。在该方法中,相移的可能值被首先计算出与所述的内积算法,然后将判据提出到范围[0,2 PI]内精确地确定它的主值的基础上的变化关系在四个象限的干扰波矢。因此,这种方法提供了一个可能的方法来解决相移在现有的一些常见的算法的不确定性。随后,相位可容易而没有任何其他测量检索。仿真和实验结果充分证明该方法的可行性,精度高。此外,它的工作原理以及开放式和闭式流苏图案。 (c)2017年Elsevier B.V.保留所有权利。

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