Various Techniques to Optimize the Quality of Schottky Contacts on ZnO Thin Films: A Short Review

摘要

Zinc oxide is a promising material for fabrication of electronic and optoelectronic devices. ZnO based Schottky diode is an important device that can be used for variety of applications. For a high quality Schottky contact on ZnO, it is essential that the quality of the ZnO film should be very good. In this paper, various techniques that can be used to improve the quality of ZnO thin film and hence the quality of Schottky contacts on ZnO have been reviewed. Techniques like surface treatments of ZnO, annealing of the film before and after deposition of the contacts, use of buffer layer and proper selection of deposition method greatly affects the quality of Schottky contact on ZnO. These methods are reported by various research groups that are discussed in this paper.