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Highly graphitized laterally interconnected SWCNT network synthesis via a sandwich-grown method

机译:通过夹心生长法高度石墨化的横向互连的SWCNT网络合成

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We present a sandwich-grown method for growing laterally interconnected single-walled carbon nanotube (SWCNT) networks with a high degree of graphitization by microwave plasma chemical vapour deposition (MPCVD). An Al_2O_3-supported Fe catalyst precursor layer deposited on an oxidized Si substrate with an upper Si cover is first pretreated in pure hydrogen, and then exposed to a gas mixture of methane/hydrogen for growth process at a lower growth temperature and a faster rate. The effects of various parameters, such as catalyst film thickness, gas flow rate, working pressure, growth time and plasma power, on the morphologies and structural characteristics of the SWCNT networks are investigated, and therefore provide the essential conditions for direct growth of laterally interconnected SWCNT networks. Analytical results demonstrate that the SWCNT-based lateral architecture comprises a mixture of graphene-sheet-wrapped catalyst particles and laterally interconnected nanotubes, isolated or branched or assembled into bundles. The results also show that the formation of the laterally interconnected SWCNT networks is related to the sandwich-like stack approach and the addition of an Al_2O_3 layer in the MPCVD process. The successful growth of lateral SWCNT networks provides new experimental information for simply and efficiently preparing lateral SWCNTs on unpatterned substrates, and opens a pathway to create network-structured nanotube-based devices.
机译:我们提出了一种三明治生长的方法,用于通过微波等离子体化学气相沉积(MPCVD)来生长具有高度石墨化作用的横向互连单壁碳纳米管(SWCNT)网络。首先在纯氢中预处理沉积在具有上层硅覆盖层的氧化硅衬底上的Al_2O_3负载的Fe催化剂前体层,然后将其暴露于甲烷/氢的气体混合物中,以较低的生长温度和更快的速率进行生长过程。研究了催化剂膜厚度,气体流速,工作压力,生长时间和等离子功率等各种参数对SWCNT网络的形态和结构特征的影响,从而为横向互连的直接生长提供了必要条件SWCNT网络。分析结果表明,基于SWCNT的横向结构包含石墨烯片包裹的催化剂颗粒和横向互连的纳米管的混合物,这些纳米管相互隔离或分支或组装成束。结果还表明,横向互连的SWCNT网络的形成与三明治式堆叠方法以及在MPCVD工艺中添加Al_2O_3层有关。横向SWCNT网络的成功发展为简单有效地在未图案化的基板上制备横向SWCNT提供了新的实验信息,并为创建网络结构的基于纳米管的器件开辟了道路。

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