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Influence of the C content on the mechanical and tribological properties of the TiCN coatings deposited by LAFAD technique

机译:碳含量对LAFAD技术沉积TiCN涂层机械和摩擦学性能的影响

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摘要

TiCN coatings with different C content were deposited using a large area filtered arc deposition (LAFAD) technique from Ti targets in a mixture of N2 and CH4 gases. Scanning electron microscopy (SEM), nano-indentation, and pin-on-disc tribometer were used to characterize the cross-sectional microstructure, hardness, modulus, wear rate, and friction coefficient of the TiCN coatings. The increase in the CH4 fraction in the gases leads to a continuous increase in the deposition rate of the TiCN coatings as well as an increase in the defect density in the coatings. Nano-indentation results indicate that with an increase of the C content in the coatings, the hardness and elastic modulus increase to a maximum at a C content of 2.8at.%, then decreases rapidly, which results from the increase in the defect density in the coatings. Tribological test results show that when tested against Al2O3 balls, there is no significant change in the friction coefficient (0.78-0.88) of the TiCN coatings with a C content of below 4.6at.%, but the friction coefficient decreases rapidly to 0.21 with a further increase in the C content to 9.3at.%. In addition, with increasing C content in the coatings from 0 to 9.3at.%, the wear rate decreases remarkably from 2.5×10-6mm3/Nm to 5.3×10-7mm3/Nm. The low friction coefficient and the formation of a transfer layer correspond to the low wear rate for the TiCN coatings with high C content.
机译:使用大面积过滤电弧沉积(LAFAD)技术从Ti靶材在N2和CH4气体的混合物中沉积具有不同C含量的TiCN涂层。使用扫描电子显微镜(SEM),纳米压痕和针盘摩擦计来表征TiCN涂层的横截面微观结构,硬度,模量,磨损率和摩擦系数。气体中CH4分数的增加导致TiCN涂层沉积速率的持续增加以及涂层中缺陷密度的增加。纳米压痕结果表明,随着涂层中C含量的增加,硬度和弹性模量在C含量为2.8at。%时达到最大值,然后迅速下降,这是由于缺陷密度增加所致。涂料。摩擦学测试结果表明,当用Al2O3球进行测试时,C含量低于4.6at。%的TiCN涂层的摩擦系数(0.78-0.88)没有明显变化,但是当摩擦系数为0.21时,摩擦系数迅速降低至0.21。碳含量进一步提高到9.3at。%。此外,随着涂层中C含量从0增加到9.3at。%,磨损率从2.5×10-6mm3 / Nm显着降低到5.3×10-7mm3 / Nm。低摩擦系数和转移层的形成对应于具有高C含量的TiCN涂层的低磨损率。

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